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Picarro is a leading provider of airborne molecular contamination (AMC) and chemical contaminant monitoring systems for advanced semiconductor fabs. Our precision metrology solutions detect inorganic and volatile organic compound (VOC) contaminants down to the parts-per-trillion (ppt) level in seconds, not hours. The speed and accuracy of our solutions enable semiconductor manufacturers to quickly mitigate contamination events in cleanrooms, FOUP, and lithography process equipment – improving production yield and reducing manufacturing and equipment maintenance costs.
Fast, precise detection of chemical and VOC contaminants in the fab
Applications
Lithography Process Tool Monitoring
Detect and quantify organic and inorganic contaminants while maintaining the lithography process integrity.
Cleanroom AMC Monitoring
Quickly identify and respond to AMCs throughout the cleanroom while minimizing excursions and yield loss.
Gas Monitoring
Measure and monitor gas concentrations in real time while improving process efficiency and reducing waste.
Products
SI Analyzers
Extremely sensitive and accurate analyzer for a range of inorganic contaminants.
SLiM 100 System
1-ppb class metrology solution for real-time detection of VOCs in the lithography process.
SAM Systems
Continuous AMC monitoring systems for cleanrooms.
Monitoring and control solutions designed for the fab environment
Measuring AMCs at low levels is extremely challenging in the semiconductor manufacturing environment. Picarro enables fab operators to overcome these challenges with a suite of solutions that deliver real-time measurements, run efficiently and effectively 24x7 in the fab environment, and can be used for high-volume process monitoring and control.
Resources
Application Notes
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Countries Served
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Instruments Sold
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Years in Business
Cutting-Edge Monitoring Solutions
Our History Leading the Industry
We are a global leader in hazardous pollutant and greenhouse gas monitoring with over 25 years of expertise, serving industrial and scientific sectors. We are ISO 9001:2015 certified, hold 77 patents, serve 100 countries, with over 5000 instruments installed, and provide innovative, end-to-end environmental monitoring and management solutions trusted by thousands worldwide.