• FOR CHIP MANUFACTURERS
    Real-time, High Sensitivity
    AMC Monitoring for
    Semiconductor Process Control

Fast, precise detection of chemical and VOC contaminants in the fab

Picarro is a leading provider of airborne molecular contamination (AMC) and chemical contaminant monitoring systems for advanced semiconductor fabs. Our precision metrology solutions detect inorganic and volatile organic compound (VOC) contaminants down to the parts-per-trillion (ppt) level in seconds, not hours. The speed and accuracy of our solutions enable semiconductor manufacturers to quickly mitigate contamination events in cleanrooms, FOUP, and lithography process equipment – improving production yield and reducing manufacturing and equipment maintenance costs. 

Monitoring and control solutions designed for the fab environment

Measuring AMCs at low levels is extremely challenging in the semiconductor manufacturing environment. Picarro enables fab operators to overcome these challenges with a suite of solutions that deliver real-time measurements, run efficiently and effectively 24x7 in the fab environment, and can be used for high-volume process monitoring and control. 

Applications

Lithography Process
Tool Monitoring

Detect and quantify organic and inorganic contaminants while maintaining the lithography process integrity

Cleanroom AMC
Monitoring

Quickly identify and respond to AMCs throughout the cleanroom while minimizing excursions and yield loss

Gas
Monitoring

Measure and monitor gas concentrations in real time while improving process efficiency and reducing waste

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Products

SLiM 100 System

1-ppb class metrology solution for real-time detection of VOCs in the lithography process

SAM Systems

Continuous AMC monitoring systems for cleanrooms

SI Analyzers

Extremely sensitive and accurate analyzer for a range of inorganic contaminants

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Contact us today for more information.
Semiconductor

Resources

App Notes
Brochures
Data Sheets