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氨气（NH₃）、氯化氢（HCl）、氟化氢（HF）气体浓度分析仪
氨气（NH₃）、氯化氢（HCl）、氟化氢（HF）气体浓度分析仪
无机气体 AMC 监测
无机气体 AMC 监测
SI3401 分析仪可实时监测氨气（NH₃）、氯化氢（HCl）和氟化氢（HF）的浓度。该分析仪专为晶圆厂环境设计，帮助运营人员快速识别并应对可能影响晶圆良率的污染事件。
SI3401 采用 Picarro 高选择性、高灵敏度、高准确度的腔衰荡光谱（CRDS）技术，具备以下特点：
灵敏度高达万亿分之一（ppt）级别
无需现场校准，仅需每年使用 CH₄、CO₂ 和 O₂ 的替代气体混合物进行一次验证
实现秒级连续测量
几乎无需维护，且不依赖耗材
| Gas Detected | HCl | HF | NH3 | H2O |
|---|---|---|---|---|
| Precision | ≤75 ppt (10 sec), ≤25 ppt (100 sec) | ≤40 ppt (10 sec), ≤13 ppt (100 sec) | ≤300 ppt (10 sec), ≤100 ppt (100 sec) | ≤20 ppt + (8 x %H2O)(10 sec), ≤10 ppt + (4 x %H2O)(100 sec) |
| Lower Detectable Limit (100s, 3σ) | 75 ppt | 40 ppt | 300 ppt | 30 ppt |
| Method Detection Limit per Semi C10-1109) | 250 ppt | 500 ppt | 500 ppt | 40 ppt |
| Linearity | ±1% | ±1% | ±1% | ±1% |
| Accuracy @ span | ±5% @ full scale | ±5% @ full scale | ±5% @ full scale | ±5% @ full scale |
| Accuracy @ zero | ±50 ppt | ±25 ppt | ±150 ppt | ±40 ppm |
| Instrument-to-Instrument Consistency | ±5% @ full scale ±50 ppt% @ zero | ±5% @ full scale ±25 ppt% @ zero | ±5% @ full scale ±150 ppt% @ zero | ±5% @ full scale ±40 ppt% @ zero |
| Measurement Range | 0-2 ppm | 0-1 ppm | 0-10 ppm | 0-40000 ppm |
| Measurement Interval | < 9s | <5s | <9s | |
| Sample Flow Rate | ~2 slpm | |||
| Combined Response Times (T90/10 + T10/90) @ 20 ppb | <3 min | <20 sec (10,000 ppm challenge) | ||
| Fall Times (T90/10 @ 20 ppb) | <1 min | <10 sec (10,000 ppm challenge) | ||
| Measurement Technique | Cavity Ring-Down Spectroscopy |
|---|---|
| Operating Temperature | 15 to 35°C (operating); -10 to 50°C (storage) |
| Ambient Humidity | <99% RH non-condensing |
| Accessories | Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional) |
| Outputs | RS-232, Ethernet, USB |
| Sample Inlet Connection | 1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing) |
| Dimensions | Analyzer: 16.7" w × 8.4" h x 24.8" d (43 × 21.3 × 63 cm) |
| Weight | 70 lbs. (31.75 kg) including pump |
| Power Requirements | 100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state |
| Warranty | 12 months |
| Certifications | CE conformance |
| Country of Manufacture | USA |
| Components/Parts | Actions | Frequency |
|---|---|---|
| Particulate filter | Replace | Every 6 months |
| Measurement Validation | Proxy validation | Every 12 months |
| Pump | Rebuild (diaphragm) | Preventive maintenance every 2 years |
| Fan assemblies | Replace | Preventive maintenance every 2 years |
| External Pump | Replace | Every 5 years |