English
简体中文
Deutsch
二氧化硫（SO₂）气体浓度分析仪
二氧化硫（SO₂）气体浓度分析仪
无机气体 AMC 监测
无机气体 AMC 监测
SI5450 将高灵敏度激光光谱技术集成于一套结构紧凑、易于操作且高度可靠的系统中。该分析仪采用中红外激光器，可高精度测量二氧化硫（SO₂）浓度，性能稳定。与传统 AMC 测量技术（如离子迁移谱 IMS、离子色谱、质谱和紫外荧光）相比，SI5450 在响应速度、检测精度和运行成本方面均具有显著优势。传统方法普遍存在响应慢、性能不足、运行成本高的问题。
主要优势
实时监测洁净室、FOUP 及晶圆厂设备中的 AMC
秒级快速、连续分析
几乎无停机时间，耗材成本极低
不受常见晶圆厂化学品干扰
极高测量准确度，适用于事件确认
| Gas Detected | Sulfur Dioxide (SO2) |
|---|---|
| Precision (1σ) | ≤360 ppt (10 sec), ≤120 ppt (100 sec), ≤70 ppt (300 sec) |
| Lower Detectable Limit (3σ) | 350 ppt (100 sec), 200 ppt (300 sec), 140 ppt (600 sec) |
| Linearity (per IEC 61207) | ±1% |
| Accuracy at span | ±5% @ full scale |
| Accuracy at zero | ±300 ppt |
| Instrument-to-Instrument Consistency | ±5% @ full scale ±300 ppt @ zero |
| Measurement Range | 0-1000 ppb |
| Measurement Interval* | < 5 seconds |
| Sample Flow Rate | ~0.2 slm |
| Combined Response Times (T90/10 + T10/90) @ 20 ppb (Humid) | <30 seconds |
| Fall Times T90/10 @ 20 ppb (Humid) | <15 seconds |
| Measurement Technique | Cavity Ring-Down Spectroscopy |
|---|---|
| Calibration Period Recommendation | Calibration not required - Initial validation at 6 months, then every 12 months thereafter |
| Time Required to Perform Validation | Estimated at <15 minutes per manufacturer's instructions |
| Measurement Cell Temperature Control | ±0.005°C |
| Measurement Cell Pressure Control | ±0.0002 atm |
| Operating Temperature | 15 to 35°C (operating); -10 to 50°C (storage) |
| Ambient Humidity | <99% RH non-condensing |
| Accessories | Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional), Maintenance Kit (optional) |
| Communication Interfaces | RS-232, Ethernet, USB, Modbus, 4-20mA (optional) |
| Sample Inlet Connection | 1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing) |
| Dimensions | Analyzer: 16.63" w x 8.75" h x 30.25" d (42.24 x 22.22 x 76.84 cm) |
| Weight | 75 lbs. (34 kg) including external pump |
| Power Requirements | 100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state |
| Warranty | 12 months |
| Certifications | CE conformance |
| Country of Manufacture | USA |
| Components/Parts | Actions | Frequency |
|---|---|---|
| Particulate filter | Replace | Every 6 months |
| Measurement Validation | Proxy validation | Every 12 months |
| Pump | Rebuild (diaphragm) | Preventive maintenance every 2 years |
| Fan assemblies | Replace | Preventive maintenance every 2 years |
| External Pump | Replace | Every 5 years |