English
简体中文
Deutsch
氨气（NH₃）气体浓度分析仪
氨气（NH₃）气体浓度分析仪
无机气体 AMC 监测
无机气体 AMC 监测
Picarro SI2103 可对氨气（NH₃）进行万亿分之一（ppt）级别的超高精度测量，具备可靠、易用、紧凑的设计。该设备可在数分钟内部署并投入运行，无需现场校准与耗材支持，可持续运行数月，无需人工干预。
主要优势
实现洁净室、FOUP 及晶圆厂设备中的实时 AMC 监测
秒级快速、连续分析
几乎无停机时间，耗材成本极低
不受常见晶圆厂化学品干扰
极高测量准确度，适用于事件确认
无需现场校准
| Gas Detected | Ammonia (NH3) |
|---|---|
| Precision (1σ) | ≤300 ppt (10 sec), ≤100 ppt (100 sec) |
| Lower Detectable Limit (3σ) | 300 ppt |
| Method Detection Limit (per Semi C10-1109) | 500 ppt |
| Linearity (per IEC 61207) | ±1% |
| Accuracy at span | ±5% @ full scale |
| Accuracy at zero | ±100 ppt |
| Instrument-to-Instrument Consistency | ±5% @ full scale ±100 ppt @ zero |
| Measurement Range | 0-10 ppb |
| Measurement Interval* | <4 seconds |
| Sample Flow Rate | ~2 slm |
| Combined Response Times (T90/10 + T10/90) @ 20 ppb | <3 minutes |
| Fall Times T90/10 @ 20 ppb | <1 minute |
*-Measurement interval at span may increase as much as 2x above listed values.
| Measurement Technique | Cavity Ring-Down Spectroscopy |
|---|---|
| Calibration Period Recommendation | Calibration not required - Initial validation at 6 months, then every 12 months thereafter |
| Time Required to Perform Validation | Estimated at <15 minutes per manufacturer's instructions |
| Measurement Cell Temperature Control | ±0.005°C |
| Measurement Cell Pressure Control | ±0.0002 atm |
| Operating Temperature | 15 to 35°C (operating); -10 to 50°C (storage) |
| Ambient Humidity | <99% RH non-condensing |
| Accessories | Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional), Maintenance Kit (optional) |
| Communication Interfaces | RS-232, Ethernet, USB, analog 0–10 V, Modbus, 4-20mA (optional) |
| Sample Inlet Connection | 1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing) |
| Dimensions | Analyzer: 17" w × 8.38" h x 24.4" d (43.2 × 21.3 × 62 cm) |
| Weight | 73 lbs. (33.18 kg) including external pump |
| Power Requirements | 100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state |
| Warranty | 12 months |
| Certifications | CE conformance |
| Country of Manufacture | USA |
| Components/Parts | Actions | Frequency |
|---|---|---|
| Particulate filter | Replace | Every 6 months |
| Measurement Validation | Proxy validation | Every 12 months |
| Pump | Rebuild (diaphragm) | Preventive maintenance every 2 years |
| Fan assemblies | Replace | Preventive maintenance every 2 years |
| External Pump | Replace | Every 5 years |